Technoorg Linda SEMPrep Smart

Traditionally, cross-sectional samples for SEM analysis have been prepared using standard metallographic procedures of cutting, mounting, grinding, and polishing the sample to a mirror finish. For most applications, this is sufficient to expose the cross-sectional material for analysis since the typical cross-sectional analysis methods such as BSE and EDS are not especially surface sensitive.

In contrast, EBSD is particularly surface sensitive and, therefore, requires the highest levels of damage/stress-free preparation. Without this, the EBSD technique will either not be able to generate high-quality Kikuchi patterns, or those that are generated will be indicative of the damaged surface layer rather than the pure, undamaged bulk material. While surfaces of appropriate damage-free quality can be prepared using traditional metallographic preparation methods, this is extremely challenging, particularly for multi-layered, multiphase or brittle/fragile materials.

Currently, the best method for preparing surfaces for EBSD analysis is by ion milling. This process uses a beam of ions to mill way material from the surface in such a manner that the surface is not physically damaged and remains stress-free. It is capable of removing the artefacts associated with traditional mechanically prepared services to make them suitable for EBSD analysis.