Zeiss CrossBeam 350 FIB-SEM

A state of the art Schottky field emission (FD) scanning electron microscope (SEM) equipped with patented Gemini electron optics that have been optimised for use with a gallium (Ga) Focused Ion Beam (FIB). The Gemini column largely mirrors that of the Gemini 2 column in the Gemini 460 SEM, with only minor differences in operability. It also offers variable pressure and exceptional low kV imaging capability. It is equipped with a similar range detectors as the Gemini for 60 SEM:

• Secondary Electron/Secondary Ion Detector (read more)
• Similar to the Everhart-Thornley SE detector, but also capable of detecting secondary ions
• Variable Pressure SE Detector (read more)
• InLens SE Detector (read more)
• Inlens EsB Detector (read more)
• Variable Pressure BSE Detector (read more)

The main difference between the CrossBeam 350 FIB-SEM and the Gemini 460 SEM is the addition of a Ga Focused Ion Beam. This beam of Ga ions can be used to “mill”/sputter away atoms from the surface. In this way it is able to cut trenches through surface features to analyse the cross-sectional characteristics, to prepare micron level features such as columns for subsequent compression testing, and to prepare TEM lamellae.